Fee Details:

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Internal users are charged a flat fee of $50.00 per mask for materials. Tool time is billed at a rate of $11.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Materials Synthesis & Characterization Facility (MaSC)
Category:
MaSC Service & Testing
Internal:
Yes
External:
No
Banner Index:
EMDP08
Fund:
058008
Org:
307150
Program:
20600
Activity:
EDWL
Amount:
$50.00/Mask
Submitted By:
Alyssa Calder
Requester:
Updated:
4/16/2021
Banner Index Title:
EMD - MaSC Testing Service
Fund Title:
EMD - MaSC Testing Service
Org Title:
EMD - Mat'l Syn & Charact (MaSC)
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

History:

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Internal users are charged a flat fee of $50.00 per mask for materials. Tool time is billed at a rate of $11.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Materials Synthesis & Characterization Facility (MaSC)
Category:
MaSC Service & Testing
Internal:
Yes
External:
No
Banner Index:
EMDP08
Fund:
058008
Org:
307150
Program:
20600
Activity:
EDWL
Amount:
$50.00/Mask
Submitted By:
Alyssa Calder
Requester:
Updated:
5/1/2020
Banner Index Title:
EMD - MaSC Testing Service
Fund Title:
EMD - MaSC Testing Service
Org Title:
EMD - Mat'l Syn & Charact (MaSC)
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Internal users are charged a flat fee of $50.00 per mask for materials. Tool time is billed at a rate of $11.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
EMDP08
Fund:
058008
Org:
307150
Program:
20600
Activity:
EDWL
Amount:
$50.00/Mask
Submitted By:
Alyssa Calder
Requester:
Updated:
5/1/2020
Banner Index Title:
EMD - MaSC Testing Service
Fund Title:
EMD - MaSC Testing Service
Org Title:
EMD - Mat'l Syn & Charact (MaSC)
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Internal users are charged a flat fee of $50.00 per mask for materials. Tool time is billed at a rate of $11.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$50.00/Mask
Submitted By:
Alyssa Calder
Requester:
Updated:
5/1/2020
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Renee Lyon
Requester:
Updated:
4/12/2019
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Travis Clark
Requester:
Updated:
4/6/2018
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Renee Lyon
Requester:
Updated:
4/10/2017
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Katherine Ferguson
Requester:
Updated:
4/12/2016
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Katherine Ferguson
Requester:
Updated:
4/15/2015
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged a one hour minimum per mask on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Gillian Yu
Requester:
Updated:
5/8/2014
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

Lithography tool for directly writing the pattern onto a photo-resist-coated substrate or generating optical masks. Users are charged a flat fee of $46.00 per mask for materials. Tool time is billed at a rate of $9.00 per hour, rounded to the nearest whole hour. Users are charged an one hour minimum on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$46.00/Mask
Submitted By:
Gillian Yu
Requester:
Updated:
5/8/2014
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

The DWL 66fs is a lithography tool that enables user designs for a device to be implemented by directly writing the pattern onto a photoresist-coated substrate or generating optical masks for conventional photolithography. Users are charged a flat fee of $30.00 per mask for materials unless the user provides their own. Tool time is billed at a rate of $6.00 per hour, rounded to the nearest whole hour. Users are charged an one hour minimum on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$6.00/Hour
Submitted By:
Gillian Yu
Requester:
Updated:
2/26/2014
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

The DWL 66fs is a lithography tool that enables user designs for a device to be implemented by directly writing the pattern onto a photoresist-coated substrate or generating optical masks for conventional photolithography. Users are charged a flat fee of $30.00 per mask for materials unless the user provides their own. Tool time is billed at a rate of $6.00 per hour, rounded to the nearest whole hour. Users are charged an one hour minimum on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$6.00/Hour
Submitted By:
Gillian Yu
Requester:
Updated:
3/18/2013
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

The DWL 66fs is a lithography tool that enables user designs for a device to be implemented by directly writing the pattern onto a photoresist-coated substrate or generating optical masks for conventional photolithography. Users are charged a flat fee of $30.00 per mask for materials unless the user provides their own. Tool time is billed at a rate of $6.00 per hour, rounded to the nearest whole hour. Users are charged an one hour minimum on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$6.00/Hour
Submitted By:
Angela Franklin
Requester:
Updated:
3/19/2012
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

The DWL 66fs is a lithography tool that enables user designs for a device to be implemented by directly writing the pattern onto a photoresist-coated substrate or generating optical masks for conventional photolithography. Users are charged a flat fee of $30.00 per mask for materials unless the user provides their own. Tool time is billed at a rate of $6.00 per hour, rounded to the nearest whole hour. Users are charged an one hour minimum on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$6.00/Hour
Submitted By:
Josh Ferris
Requester:
Updated:
3/11/2011
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

10803: Heidelberg Laser Lithography Tool

The DWL 66fs is a lithography tool that enables user designs for a device to be implemented by directly writing the pattern onto a photoresist-coated substrate or generating optical masks for conventional photolithography. Users are charged a flat fee of $30.00 per mask for materials unless the user provides their own. Tool time is billed at a rate of $6.00 per hour, rounded to the nearest whole hour. Users are charged an one hour minimum on this tool.
Unit:
College of Engineering
Department:
Sch Elect Engr/Comp Sci Admin
Category:
Electrical and Computer Engineering Service and Testing
Internal:
Yes
External:
No
Banner Index:
ESEP08
Fund:
058008
Org:
303210
Program:
20600
Activity:
EDWL
Amount:
$6.00/Hour
Submitted By:
Josh Ferris
Requester:
Updated:
9/21/2010
Banner Index Title:
ESE - Elec Comp Testing Svc
Fund Title:
EMD - MaSC Testing Service
Org Title:
ESE - School Prgm General
Program Title:
Other Public Services/Testing
Activity Title:
ESE - Heidelberg Pattern Generator

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